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Results: 2
SUBMICRON LIGA PROCESS FOR MOVABLE MICROSTRUCTURES
Authors:
BORNER MW KOHL M PANTENBURG FJ BACHER W HEIN H SCHOMBURG WK
Citation:
Mw. Borner et al., SUBMICRON LIGA PROCESS FOR MOVABLE MICROSTRUCTURES, Microelectronic engineering, 30(1-4), 1996, pp. 505-508
ULTRASONIC MEASUREMENTS WITH MICROMEMBRANES
Authors:
BORNER MW ZURHORSTMEYER S MURPHY MC MUNCH HJ SCHOMBURG WK VITT M
Citation:
Mw. Borner et al., ULTRASONIC MEASUREMENTS WITH MICROMEMBRANES, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 62-65
Risultati:
1-2
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