Authors: CASADY JB LUCKOWSKI ED BOZACK M SHERIDAN D JOHNSON RW WILLIAMS JR

Citation: Jb. Casady et al., ETCHING OF 6H-SIC AND 4H-SIC USING NF3 IN A REACTIVE ION ETCHING SYSTEM, Journal of the Electrochemical Society, 143(5), 1996, pp. 1750-1753