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ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .2. THEORETICAL 2-DIMENSIONAL ETCHED SHAPES - DISCUSSION OF THE ADEQUATION OF THE DISSOLUTION SLOWNESS SURFACE
Authors: TELLIER CR BRAHIMBOUNAB A
Citation: Cr. Tellier et A. Brahimbounab, ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .2. THEORETICAL 2-DIMENSIONAL ETCHED SHAPES - DISCUSSION OF THE ADEQUATION OF THE DISSOLUTION SLOWNESS SURFACE, Journal of Materials Science, 29(24), 1994, pp. 6354-6378
ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .1. EXPERIMENTAL ETCHED SHAPES AND DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE
Authors: TELLIER CR BRAHIMBOUNAB A
Citation: Cr. Tellier et A. Brahimbounab, ANISOTROPIC ETCHING OF SILICON-CRYSTALS IN KOH SOLUTION .1. EXPERIMENTAL ETCHED SHAPES AND DETERMINATION OF THE DISSOLUTION SLOWNESS SURFACE, Journal of Materials Science, 29(22), 1994, pp. 5953-5971
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