Authors: BARNA GG LOEWENSTEIN LM ROBBINS R OBRIEN S LANE A WHITE DD HANRATTY M HOSCH J SHINN GB TAYLOR K BRANKNER K

Citation: Gg. Barna et al., MMST MANUFACTURING TECHNOLOGY - HARDWARE, SENSORS, AND PROCESSES, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 149-158