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Results: 1
MAGNETICALLY CONFINED INDUCTIVELY-COUPLED PLASMA-ETCHING REACTOR
Authors:
LAI C BRUNMEIER B WOODS RC
Citation:
C. Lai et al., MAGNETICALLY CONFINED INDUCTIVELY-COUPLED PLASMA-ETCHING REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 2086-2092
Risultati:
1-1
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