Authors:
BUCHHOLD R
NAKLADAL A
BUTTNER U
GERLACH G
Citation: R. Buchhold et al., THE METROLOGICAL BEHAVIOR OF BIMORPHIC PIEZORESISTIVE HUMIDITY SENSORS, Measurement science & technology, 9(3), 1998, pp. 354-359
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
EICHHORN KJ
MULLER M
Citation: R. Buchhold et al., REDUCTION OF MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED VOLUME EXPANSION OF POLYMER LAYERS, Microsystem technologies, 5(1), 1998, pp. 3-12
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
EICHHORN KJ
Citation: R. Buchhold et al., MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED INPLANE EXPANSION OF THIN POLYMER-FILMS, Thin solid films, 312(1-2), 1998, pp. 232-239
Authors:
BUCHHOLD R
NAKLADAL A
GERLACH G
SAHRE K
MULLER M
EICHHORN KJ
HEROLD M
GAUGLITZ G
Citation: R. Buchhold et al., A STUDY ON THE MICROPHYSICAL MECHANISMS OF ADSORPTION IN POLYIMIDE LAYERS FOR MICROELECTRONIC APPLICATIONS, Journal of the Electrochemical Society, 145(11), 1998, pp. 4012-4018