Authors: BUCHHOLD R NAKLADAL A BUTTNER U GERLACH G

Citation: R. Buchhold et al., THE METROLOGICAL BEHAVIOR OF BIMORPHIC PIEZORESISTIVE HUMIDITY SENSORS, Measurement science & technology, 9(3), 1998, pp. 354-359

Authors: BUCHHOLD R NAKLADAL A GERLACH G SAHRE K EICHHORN KJ MULLER M

Citation: R. Buchhold et al., REDUCTION OF MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED VOLUME EXPANSION OF POLYMER LAYERS, Microsystem technologies, 5(1), 1998, pp. 3-12

Authors: BUCHHOLD R NAKLADAL A GERLACH G SAHRE K EICHHORN KJ

Citation: R. Buchhold et al., MECHANICAL-STRESS IN MICROMACHINED COMPONENTS CAUSED BY HUMIDITY-INDUCED INPLANE EXPANSION OF THIN POLYMER-FILMS, Thin solid films, 312(1-2), 1998, pp. 232-239

Authors: BUCHHOLD R NAKLADAL A GERLACH G SAHRE K MULLER M EICHHORN KJ HEROLD M GAUGLITZ G

Citation: R. Buchhold et al., A STUDY ON THE MICROPHYSICAL MECHANISMS OF ADSORPTION IN POLYIMIDE LAYERS FOR MICROELECTRONIC APPLICATIONS, Journal of the Electrochemical Society, 145(11), 1998, pp. 4012-4018