Authors:
BURGER J
BERENSCHOT E
BURGER GJ
VISSCHER H
ELWENSPOEK M
Citation: J. Burger et al., PIEZORESISTIVE FRICTION FORCE SENSOR FOR TRIBOLOGICAL RESEARCH, Journal of micromechanics and microengineering, 8(2), 1998, pp. 138-140
Citation: Jge. Gardeniers et al., PREFERRED ORIENTATION AND PIEZOELECTRICITY IN SPUTTERED ZNO FILMS, Journal of applied physics, 83(12), 1998, pp. 7844-7854
Authors:
IMAI S
BURGER GJ
LAMMERINK TSJ
FLUITMAN JHJ
Citation: S. Imai et al., OUTPUT CHARACTERISTICS OF A THIN-FILM PIEZOELECTRIC AE SENSOR FOR MAGNETIC HEAD-DISK INTERACTION, JSME international journal. Series C, dynamics, control, robotics, design and manufacturing, 40(1), 1997, pp. 33-41
Citation: Gj. Burger et al., HIGH-RESOLUTION SHADOW-MASK PATTERNING IN DEEP HOLES AND ITS APPLICATION TO AN ELECTRICAL WAFER FEED-THROUGH, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 669-673
Authors:
IMAI S
BURGER GJ
LAMMERINK TSJ
FLUITMAN JHJ
Citation: S. Imai et al., FUNDAMENTAL-STUDY ON A THIN-FILM AE SENSOR FOR MEASUREMENT OF BEHAVIOR OF A MULTI-PAD CONTACT SLIDER, IEEE transactions on magnetics, 32(5), 1996, pp. 3675-3677
Authors:
IMAI S
TOKUYAMA M
HIROSE S
BURGER GJ
LAMMERINK TSJ
FLUITMAN JHJ
Citation: S. Imai et al., A THIN-FILM PIEZOELECTRIC IMPACT SENSOR ARRAY FABRICATED ON A SI SLIDER FOR MEASURING HEAD-DISK INTERACTION, IEEE transactions on magnetics, 31(6), 1995, pp. 3009-3011