Authors: CHANG SLL HANESTAD R BUTTERBAUGH JW

Citation: Sll. Chang et al., ANHYDROUS HF ETCH REDUCES PROCESSING STEPS FOR DRAM CAPACITORS, Solid state technology, 41(5), 1998, pp. 71

Authors: CHANG JP ZHANG Z XU H SAWIN HH BUTTERBAUGH JW

Citation: Jp. Chang et al., TRANSITION-METAL CLEANING USING THERMAL BEAMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2959-2967

Authors: GRAY DC BUTTERBAUGH JW HIATT CF LAWING AS SAWIN HH

Citation: Dc. Gray et al., PHOTOCHEMICAL DRY-ETCHING OF DOPED AND UNDOPED SILICON-OXIDES, Journal of the Electrochemical Society, 142(11), 1995, pp. 3859-3863

Authors: GRAY DC BUTTERBAUGH JW HIATT CF LAWING AS SAWIN HH

Citation: Dc. Gray et al., PHOTOCHEMICAL DRY STRIPPING OF SILICON-NITRIDE FILMS, Journal of the Electrochemical Society, 142(11), 1995, pp. 3919-3923

Authors: HARGIS PJ GREENBERG KE MILLER PA GERARDO JB TORCZYNSKI JR RILEY ME HEBNER GA ROBERTS JR OLTHOFF JK WHETSTONE JR VANBRUNT RJ SOBOLEWSKI MA ANDERSON HM SPLICHAL MP MOCK JL BLETZINGER P GARSCADDEN A GOTTSCHO RA SELWYN G DALVIE M HEIDENREICH JE BUTTERBAUGH JW BRAKE ML PASSOW ML PENDER J LUJAN A ELTA ME GRAVES DB SAWIN HH KUSHNER MJ VERDEYEN JT HORWATH R TURNER TR

Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154