Authors: Mahorowala, AP Babich, K Lin, Q Medeiros, DR Petrillo, K Simons, J Angelopoulos, M Sooriyakumaran, R Hofer, D Reynolds, GW Taylor, JW

Citation: Ap. Mahorowala et al., Transfer etching of bilayer resists in oxygen-based plasmas, J VAC SCI A, 18(4), 2000, pp. 1411-1419