Authors: Ruzyllo, J Rohr, E Baeyens, M Mertens, P Heyns, M

Citation: J. Ruzyllo et al., Fluorine in thermal oxides from HF preoxidation surface treatments, EL SOLID ST, 2(7), 1999, pp. 336-338

Authors: Martin, AR Baeyens, M Hub, W Mertens, PW Kolbesen, BO

Citation: Ar. Martin et al., Alkaline cleaning of silicon wafers: additives for the prevention of metalcontamination, MICROEL ENG, 45(2-3), 1999, pp. 197-208

Authors: Knotter, DM de Gendt, S Baeyens, M Mertens, PW Heyns, HM

Citation: Dm. Knotter et al., Hydrogen peroxide decomposition in ammonia solutions, J ELCHEM SO, 146(9), 1999, pp. 3476-3481