Citation: C. Montcalm et al., MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength, OPTICS LETT, 26(3), 2001, pp. 125-127
Citation: Jf. Seely et al., High-efficiency MoRu-Be multilayer-coated gratings operating near normal incidence in the 11.1-12.0-nm wavelength range, APPL OPTICS, 40(31), 2001, pp. 5565-5574
Citation: Pb. Mirkarimi et al., Mo/Si and Mo/Be multilayer thin films on Zerodur substrates for extreme-ultraviolet lithography, APPL OPTICS, 39(10), 2000, pp. 1617-1625