Authors:
Boudreau, MG
Wallace, SG
Balcaitis, G
Murugkar, S
Haugen, HK
Mascher, P
Citation: Mg. Boudreau et al., Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors, APPL OPTICS, 39(6), 2000, pp. 1053-1058