Authors: Standaert, TEFM Matsuo, PJ Li, X Oehrlein, GS Lu, TM Gutmann, R Rosenmayer, CT Bartz, JW Langan, JG Entley, WR

Citation: Tefm. Standaert et al., High-density plasma patterning of low dielectric constant polymers: A comparison between polytetrafluoroethylene, parylene-N, and poly(arylene ether), J VAC SCI A, 19(2), 2001, pp. 435-446