Authors:
Laurent, T
Bastien, FO
Pommier, JC
Cachard, A
Remiens, D
Cattan, E
Citation: T. Laurent et al., Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane - Application to sensors able to operate in contact with liquid, SENS ACTU-A, 87(1-2), 2000, pp. 26-37