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Results:
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Results: 1
Effects of arsenic doping on chemical vapor deposition of titanium silicide
Authors:
Fang, H Ozturk, MC Seebauer, EG Batchelor, DE
Citation:
H. Fang et al., Effects of arsenic doping on chemical vapor deposition of titanium silicide, J ELCHEM SO, 146(11), 1999, pp. 4240-4245
Risultati:
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