Authors: da Costa, MEHM Freire, FL Jacobsohn, LG Franceschini, D Mariotto, G Baumvol, IRJ

Citation: Mehm. Da Costa et al., Fluorine incorporation into amorphous hydrogenated carbon films deposited by plasma-enhanced chemical vapor deposition: structural modifications investigated by X-ray photoelectron spectrometry and Raman spectroscopy, DIAM RELAT, 10(3-7), 2001, pp. 910-914