Authors: Passeraub, PA Besse, PA Bayadroun, A Hediger, S Bernasconi, E Popovic, RS

Citation: Pa. Passeraub et al., First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil, SENS ACTU-A, 76(1-3), 1999, pp. 273-278