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ENG
Results:
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Results: 1
Behavior of molybdenum in silicon evaluated for integrated circuit processing
Authors:
Benton, JL Jacobson, DC Jackson, B Johnson, JA Boone, T Eaglesham, DJ Stevie, FA Becerro, J
Citation:
Jl. Benton et al., Behavior of molybdenum in silicon evaluated for integrated circuit processing, J ELCHEM SO, 146(5), 1999, pp. 1929-1933
Risultati:
1-1
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