Authors: Bedell, SW Lanford, WA

Citation: Sw. Bedell et Wa. Lanford, Investigation of surface blistering of hydrogen implanted crystals, J APPL PHYS, 90(3), 2001, pp. 1138-1146

Authors: Current, MI Bedell, SW Malik, IJ Feng, LM Henley, FJ

Citation: Mi. Current et al., What is the future of sub-100nm CMOS: Ultrashallow junctions or ultrathin SOI?, SOL ST TECH, 43(9), 2000, pp. 66