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Results:
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Results: 3
Time-resolved investigations of pulsed microwave excited plasmas
Authors:
Behle, S Brockhaus, A Engemann, J
Citation:
S. Behle et al., Time-resolved investigations of pulsed microwave excited plasmas, PLASMA SOUR, 9(1), 2000, pp. 57-67
Diagnostics of a chemically active, pulsed microwave plasma for depositionof quartz-like films
Authors:
Brockhaus, A Behle, S Georg, A Schwabedissen, A Soll, C Engemann, J
Citation:
A. Brockhaus et al., Diagnostics of a chemically active, pulsed microwave plasma for depositionof quartz-like films, CONTR PLASM, 39(5), 1999, pp. 399-409
Ignition phase of a pulsed microwave-excited oxygen plasma
Authors:
Brockhaus, A Behle, S Georg, A Engemann, J
Citation:
A. Brockhaus et al., Ignition phase of a pulsed microwave-excited oxygen plasma, J PHYS IV, 8(P7), 1998, pp. 297-306
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