Citation: U. Behnke et al., Cross-talk in electric force microscopy testing of parallel submicrometer conducting lines, MICROEL REL, 40(8-10), 2000, pp. 1401-1406
Authors:
Wittpahl, V
Ney, C
Behnke, U
Mertin, W
Kubalek, E
Citation: V. Wittpahl et al., Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz, MICROEL REL, 39(6-7), 1999, pp. 951-956
Citation: U. Behnke et al., Voltage contrast measurements on sub-micrometer structures with an electric force microscope based test system, MICROEL REL, 39(6-7), 1999, pp. 969-974