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Results: 1
Approaching the limit for quantitative SIMS measurement of ultra-thin nitrided SiO2 films
Authors:
Novak, SW Bekos, EJ Marino, JW
Citation:
Sw. Novak et al., Approaching the limit for quantitative SIMS measurement of ultra-thin nitrided SiO2 films, APPL SURF S, 175, 2001, pp. 678-684
Risultati:
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