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Results:
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Results: 1
'Real-time' multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiNx deposition
Authors:
Kechagias, VG Gioti, M Logothetidis, S Benferhat, R Teer, D
Citation:
Vg. Kechagias et al., 'Real-time' multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiNx deposition, THIN SOL FI, 364(1-2), 2000, pp. 213-219
Risultati:
1-1
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