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Results: 1
Characterisation of LPCVD silicon oxynitride films by optical spectroscopy
Authors:
Bercu, M Cobianu, C Modreanu, M Bercu, BN
Citation:
M. Bercu et al., Characterisation of LPCVD silicon oxynitride films by optical spectroscopy, J PHYS IV, 11(PR3), 2001, pp. 963-969
Risultati:
1-1
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