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Results:
1-3
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Results: 3
Structural and morphological changes in low temperature annealed LPCVD Si layers
Authors:
Cobianu, B Modreanu, M Danila, M Gavrila, R Bercu, M Gartner, M
Citation:
B. Cobianu et al., Structural and morphological changes in low temperature annealed LPCVD Si layers, J PHYS IV, 11(PR3), 2001, pp. 315-323
Characterisation of LPCVD silicon oxynitride films by optical spectroscopy
Authors:
Bercu, M Cobianu, C Modreanu, M Bercu, BN
Citation:
M. Bercu et al., Characterisation of LPCVD silicon oxynitride films by optical spectroscopy, J PHYS IV, 11(PR3), 2001, pp. 963-969
Physical properties of polycrystalline silicon films related to LPCVD conditions
Authors:
Modreanu, M Bercu, M Cobianu, C
Citation:
M. Modreanu et al., Physical properties of polycrystalline silicon films related to LPCVD conditions, THIN SOL FI, 383(1-2), 2001, pp. 212-215
Risultati:
1-3
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