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Results:
1-2
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Results: 2
Optical endpoint detection for chemical mechanical planarization
Authors:
Bibby, T Adams, JA Holland, K
Citation:
T. Bibby et al., Optical endpoint detection for chemical mechanical planarization, J VAC SCI B, 17(5), 1999, pp. 2378-2384
Effects of carrier film physical properties on WCMP
Authors:
Wang, D Zutshi, A Bibby, T Beaudoin, SP Cale, TS
Citation:
D. Wang et al., Effects of carrier film physical properties on WCMP, THIN SOL FI, 345(2), 1999, pp. 278-283
Risultati:
1-2
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