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Results: 1
Second-oxidation properties of thin polysilicon films grown by LPCVD and heavily in situ boron-doped
Authors:
Boukezzata, M Birouk, B Bielle-Daspet, D
Citation:
M. Boukezzata et al., Second-oxidation properties of thin polysilicon films grown by LPCVD and heavily in situ boron-doped, THIN SOL FI, 335(1-2), 1998, pp. 70-79
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