Authors: Loo, R Caymax, M Libezny, M Blavier, G Brijs, B Geenen, L Vandervorst, W

Citation: R. Loo et al., Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques, J ELCHEM SO, 147(2), 2000, pp. 751-755