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Results:
1-8
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Results: 8
Authors:
Boher, P
Evrard, P
Piel, JP
Defranoux, C
Stehle, JL
Citation: P. Boher et al., Characterizing resists and films with VUV spectroscopic ellipsometry, SOL ST TECH, 44(7), 2001, pp. 165
Authors:
Rey, S
Antoni, F
Prevot, B
Fogarassy, E
Arnault, JC
Hommet, J
Le Normand, F
Boher, P
Citation: S. Rey et al., Thermal stability of amorphous carbon films deposited by pulsed laser ablation, APPL PHYS A, 71(4), 2000, pp. 433-439
Authors:
Bonan, J
Meyer, F
Finkman, E
Warren, P
Boher, P
Citation: J. Bonan et al., Carbon dependence of the dielectric response function in epitaxial SiGeC layers grown on Si, THIN SOL FI, 364(1-2), 2000, pp. 53-57
Authors:
Fogarassy, E
de Unamuno, S
Prevot, B
Boher, P
Stehle, M
Pribat, D
Citation: E. Fogarassy et al., Super-lateral-growth regime analysis in long-pulse-duration excimer-laser crystallization of a-Si films on SiO2, APPL PHYS A, 68(6), 1999, pp. 631-635
Authors:
Boher, P
Stehle, JL
Fogarassy, E
Citation: P. Boher et al., A new process to manufacture thin SiGe and SiGeC epitaxial films on silicon by ion implantation and excimer laser annealing, APPL SURF S, 139, 1999, pp. 199-205
Authors:
Boher, P
Bucchia, M
Rey, JP
Stehle, JL
Citation: P. Boher et al., SOPRA SE300: a new tool for high accuracy characterization of multilayer structures, MICROEL ENG, 45(2-3), 1999, pp. 269-276
Authors:
Helen, Y
Mourgues, K
Raoult, F
Mohammed-Brahim, T
Bonnaud, O
Rogel, R
Prochasson, S
Boher, P
Zahorski, D
Citation: Y. Helen et al., Single shot excimer laser crystallization and LPCVD silicon TFTs, THIN SOL FI, 337(1-2), 1999, pp. 133-136
Authors:
Boher, P
Stehle, JL
Citation: P. Boher et Jl. Stehle, A new versatile instrument for characterization of thin films and multilayers using spectroscopic ellipsometry and grazing X-ray reflectance, PHYS ST S-A, 170(2), 1998, pp. 211-220
Risultati:
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