Authors: Daniel, JH Krusor, B Apte, RB Mulato, M Van Schuylenbergh, K Lau, R Do, T Street, RA Goredema, A Boils-Boissier, DC Kazmaier, PM

Citation: Jh. Daniel et al., Micro-electro-mechanical system fabrication technology applied to large area x-ray image sensor arrays, J VAC SCI A, 19(4), 2001, pp. 1219-1223