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Results: 26-30/30
Authors:
Attwood, DT
Naulleau, P
Goldberg, KA
Tejnil, E
Chang, C
Beguiristain, R
Batson, P
Bokor, J
Gullikson, EM
Koike, M
Medecki, H
Underwood, JH
Citation: Dt. Attwood et al., Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions, IEEE J Q EL, 35(5), 1999, pp. 709-720
Authors:
Pu, NW
Bokor, J
Jeong, S
Zhao, RA
Citation: Nw. Pu et al., Picosecond ultrasonic study of Mo/Si multilayer structures using an alternating-pump technique, APPL PHYS L, 74(2), 1999, pp. 320-322
Authors:
Naulleau, PP
Goldberg, KA
Lee, SH
Chang, C
Attwood, D
Bokor, J
Citation: Pp. Naulleau et al., Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy, APPL OPTICS, 38(35), 1999, pp. 7252-7263
Authors:
Jeong, ST
Idir, M
Lin, Y
Johnson, L
Rekawa, S
Jones, M
Denham, P
Batson, P
Levesque, R
Kearney, P
Yan, PY
Gullikson, E
Underwood, JH
Bokor, J
Citation: St. Jeong et al., At-wavelength detection of extreme ultraviolet lithography mask blank defects, J VAC SCI B, 16(6), 1998, pp. 3430-3434
Authors:
Goldberg, KA
Naulleau, P
Lee, S
Bresloff, C
Henderson, C
Attwood, D
Bokor, J
Citation: Ka. Goldberg et al., High-accuracy interferometry of extreme ultraviolet lithographic optical systems, J VAC SCI B, 16(6), 1998, pp. 3435-3439