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Results: 2
A 13.56 MHz multicusp ion source for high intensity Ar beam
Authors:
Boonyawan, D Chirapatpimol, N Sanguansak, N Vilaithong, T
Citation:
D. Boonyawan et al., A 13.56 MHz multicusp ion source for high intensity Ar beam, REV SCI INS, 71(2), 2000, pp. 1181-1183
A 13.56 MHz multicusp ion source for gaseous ion-beam production
Authors:
Boonyawan, D Suanpoot, P Vilaithong, T
Citation:
D. Boonyawan et al., A 13.56 MHz multicusp ion source for gaseous ion-beam production, SURF COAT, 112(1-3), 1999, pp. 314-317
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