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Results: 1
Characterization of bending in single crystal Si beams and resonators
Authors:
Weigold, JW Juan, WH Pang, SW Borenstein, JT
Citation:
Jw. Weigold et al., Characterization of bending in single crystal Si beams and resonators, J VAC SCI B, 17(4), 1999, pp. 1336-1340
Risultati:
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