Authors: Katai, S Tass, Z Bori, L Hars, G Deak, P

Citation: S. Katai et al., Plasma analyser for plasma-assisted surface process diagnostics up to 100 mbar, VACUUM, 56(1), 2000, pp. 39-43

Authors: Katai, S Tass, Z Bori, L Hars, G Deak, P Geelhaar, L

Citation: S. Katai et al., Ion beam mass spectrometer for compositional analysis of plasma assisted surface processes in the pressure range of 1-50 mbar, REV SCI INS, 70(8), 1999, pp. 3324-3328