Authors:
Conde, JP
Alpuim, P
Boucinha, M
Gaspar, J
Chu, V
Citation: Jp. Conde et al., Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: application to devices and thin-film microelectromechanical systems, THIN SOL FI, 395(1-2), 2001, pp. 105-111