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Results: 1-4 |
Results: 4

Authors: Conde, JP Alpuim, P Boucinha, M Gaspar, J Chu, V
Citation: Jp. Conde et al., Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: application to devices and thin-film microelectromechanical systems, THIN SOL FI, 395(1-2), 2001, pp. 105-111

Authors: Boucinha, M Chu, V Conde, JP
Citation: M. Boucinha et al., Thin film micromachined structures for large-area applications, J NON-CRYST, 266, 2000, pp. 1340-1344

Authors: Boucinha, M Brogueira, P Chu, V Conde, JP
Citation: M. Boucinha et al., Amorphous silicon air-gap resonators on large-area substrates, APPL PHYS L, 77(6), 2000, pp. 907-909

Authors: Boucinha, M Chu, V Alpuim, JP Conde, JP
Citation: M. Boucinha et al., Micromachining of an air-bridge structure using thin-films on glass substrates, SENS ACTU-A, 74(1-3), 1999, pp. 5-8
Risultati: 1-4 |