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Authors:
Perez, JM
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Bourdillon, A
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Vladimirsky, Y
Bourdillon, A
Vladimirsky, O
Jiang, W
Leonard, Q
Citation: Y. Vladimirsky et al., Demagnification in proximity x-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction, J PHYS D, 32(22), 1999, pp. L114-L118