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Results: 1
Simulation of plasma processes for microelectronic fabrication
Authors:
Brinkman, RP Kratzer, M Schmidt, H
Citation:
Rp. Brinkman et al., Simulation of plasma processes for microelectronic fabrication, PUR A CHEM, 71(10), 1999, pp. 1863-1869
Risultati:
1-1
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