Authors: Buhling, S Wyrowski, F Kley, EB Nellissen, AJM Wang, LL Dirkzwager, M

Citation: S. Buhling et al., Resolution enhanced proximity printing by phase and amplitude modulating masks, J MICROM M, 11(5), 2001, pp. 603-611

Authors: Buhling, S Wyrowski, F

Citation: S. Buhling et F. Wyrowski, Solving tolerancing and three-dimensional beam shaping problems by multifunctional wave optical design, OPT ENG, 40(8), 2001, pp. 1590-1597