Authors: TSAI JY CANOVAI C OSBURN CM WANG QF ROSE J COWEN A DENKER MS

Citation: Jy. Tsai et al., SOLID SOURCE DIFFUSION FROM AGGLOMERATING SILICIDE SOURCES .1. MEASUREMENT AND MODELING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 219-229