Authors:
LAIDANI N
BONELLI M
MIOTELLO A
GUZMAN L
CALLIARI L
ELENA M
BERTONCELLO R
GLISENTI A
CAPELLETTI R
OSSI P
Citation: N. Laidani et al., CHEMICAL AND COMPOSITIONAL CHANGES INDUCED BY N+ IMPLANTATION IN AMORPHOUS SIC FILMS, Journal of applied physics, 74(3), 1993, pp. 2013-2020