Authors: SHAN HC LEE E WELCH M PU B CARDUCCI J KE KH GAO H LUSCHER P CREAN G WANG R BLUME R COOPER J WU R

Citation: Hc. Shan et al., MXP- A NEW DIELECTRIC ETCHER WITH ENABLING TECHNOLOGY, HIGH PRODUCTIVITY, AND LOW COST-OF-CONSUMABLES( ), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 716-723