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Results: 2

Authors: ALERS GB WERDER DJ CHABAL Y LU HC GUSEV EP GARFUNKEL E GUSTAFSSON T URDAHL RS
Citation: Gb. Alers et al., INTERMIXING AT THE TANTALUM OXIDE SILICON INTERFACE IN GATE DIELECTRIC STRUCTURES/, Applied physics letters, 73(11), 1998, pp. 1517-1519

Authors: AYDIL ES ZHOU Z GIAPIS KP CHABAL Y GREGUS JA GOTTSCHO RA
Citation: Es. Aydil et al., REAL-TIME, INSITU MONITORING OF SURFACE-REACTIONS DURING PLASMA PASSIVATION OF GAAS, Applied physics letters, 62(24), 1993, pp. 3156-3158
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