Authors:
ALERS GB
WERDER DJ
CHABAL Y
LU HC
GUSEV EP
GARFUNKEL E
GUSTAFSSON T
URDAHL RS
Citation: Gb. Alers et al., INTERMIXING AT THE TANTALUM OXIDE SILICON INTERFACE IN GATE DIELECTRIC STRUCTURES/, Applied physics letters, 73(11), 1998, pp. 1517-1519
Authors:
AYDIL ES
ZHOU Z
GIAPIS KP
CHABAL Y
GREGUS JA
GOTTSCHO RA
Citation: Es. Aydil et al., REAL-TIME, INSITU MONITORING OF SURFACE-REACTIONS DURING PLASMA PASSIVATION OF GAAS, Applied physics letters, 62(24), 1993, pp. 3156-3158