Authors: WANG X CHARLAMOV V KOLITSCH A POSSELT M TRUSHIN Y MOLLER W

Citation: X. Wang et al., STUDY OF ION-BEAM-ASSISTED DEPOSITION OF AI AIN MULTILAYERS BY COMPARISON OF COMPUTER-SIMULATION AND EXPERIMENT/, Journal of physics. D, Applied physics (Print), 31(18), 1998, pp. 2241-2244