Citation: Khl. Chau et Re. Sulouff, TECHNOLOGY FOR THE HIGH-VOLUME MANUFACTURING OF INTEGRATED SURFACE-MICROMACHINED ACCELEROMETER PRODUCTS, Microelectronics, 29(9), 1998, pp. 579-586
Authors:
CHAU KHL
LEWIS SR
ZHAO Y
HOWE RT
BART SF
MARCHESELLI RG
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