Authors: RESNICK DJ CUMMINGS KD DAUKSHER WJ JOHNSON WA SEESE PA CHEN HTH WELLS GM ENGELSTAD R CERRINA F

Citation: Dj. Resnick et al., THE EFFECT OF APERTURING ON RADIATION DAMAGE-INDUCED PATTERN DISTORTION OF X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3046-3049

Authors: WELLS GM CHEN HTH WALLACE JP ENGELSTAD RL CERRINA F

Citation: Gm. Wells et al., RADIATION DAMAGE-INDUCED CHANGES IN SILICON-NITRIDE MEMBRANE MECHANICAL-PROPERTIES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3075-3077

Authors: CHEN HTH ENGELSTAD RL CERRINA F

Citation: Hth. Chen et al., NOVEL TECHNIQUE FOR THE SEPARATION OF MECHANICAL-PROPERTIES AND INTRINSIC STRESS OF PRE-IRRADIATED AND POST-IRRADIATED MEMBRANES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3975-3978

Authors: RESNICK DJ CUMMINGS KD JOHNSON WA CHEN HTH CHOI B ENGELSTAD RL

Citation: Dj. Resnick et al., TEMPERATURE UNIFORMITY ACROSS AN X-RAY MASK MEMBRANE DURING RESIST BAKING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4033-4037