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THICKNESS-SCALING OF SPUTTERED PZT FILMS IN THE 200 NM RANGE FOR MEMORY APPLICATIONS
Authors: SUDHAMA C KIM J KHAMANKAR R CHIKARMANE V LEE JC
Citation: C. Sudhama et al., THICKNESS-SCALING OF SPUTTERED PZT FILMS IN THE 200 NM RANGE FOR MEMORY APPLICATIONS, Journal of electronic materials, 23(12), 1994, pp. 1261-1268
EFFECT OF LANTHANUM DOPING ON THE ELECTRICAL-PROPERTIES OF SOL-GEL DERIVED FERROELECTRIC LEAD-ZIRCONATE-TITANATE FOR ULTRA-LARGE-SCALE INTEGRATION DYNAMIC RANDOM-ACCESS MEMORY APPLICATIONS
Authors: SUDHAMA C KIM J LEE J CHIKARMANE V SHEPHERD W MYERS ER
Citation: C. Sudhama et al., EFFECT OF LANTHANUM DOPING ON THE ELECTRICAL-PROPERTIES OF SOL-GEL DERIVED FERROELECTRIC LEAD-ZIRCONATE-TITANATE FOR ULTRA-LARGE-SCALE INTEGRATION DYNAMIC RANDOM-ACCESS MEMORY APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1302-1309
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