Authors: CHILDS KD NARUM D LAVANIER LA LINDLEY PM SCHUELER BW MULHOLLAND G DIEBOLD AC

Citation: Kd. Childs et al., COMPARISON OF SUBMICRON PARTICLE ANALYSIS BY AUGER-ELECTRON SPECTROSCOPY, TIME-OF-FLIGHT SECONDARY-ION MASS-SPECTROMETRY, AND SECONDARY-ELECTRON MICROSCOPY WITH ENERGY-DISPERSIVE X-RAY SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2392-2404