Authors: CHITTIPEDDI S KANNAN VC RAMBABU B

Citation: S. Chittipeddi et al., INTEGRITY OF SHALLOW JUNCTION CMOS STRUCTURES WITH TI TIN/AL-SI-CU AND TI/TIN/AL-CU CONTACT METALLIZATION/, Solid-state electronics, 38(12), 1995, pp. 2035-2040

Authors: CHITTIPEDDI S DZIUBA CM KANNAN VC KELLY MJ COCHRAN WT RAMBABU B

Citation: S. Chittipeddi et al., EFFECT OF RAPID THERMALLY NITRIDED TITANIUM FILMS CONTACTING SILICIDED AND NONSILICIDED JUNCTIONS, Journal of electronic materials, 22(7), 1993, pp. 785-791

Authors: CHITTIPEDDI S KELLY MJ VELAGA AN KANNAN VC DZIUBA CM COCHRAN WT RAMBABU B

Citation: S. Chittipeddi et al., EFFECT OF DOPANTS ON THE THERMAL-PROCESSING OF SALICIDED (TITANIUM DISALICIDED) CMOS STRUCTURES, Semiconductor science and technology, 8(11), 1993, pp. 2023-2029