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Authors: CHOWDHURY EA DASHIELL M QIU G OLOWOLAFE JO JONCZYK R SMITH D BARNETT A KOLODZEY J UNRUH KM SWANN CP SUEHLE J CHEN YA
Citation: Ea. Chowdhury et al., STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF OXIDIZED ALN THIN-FILMS AT DIFFERENT TEMPERATURES, Journal of electronic materials, 27(7), 1998, pp. 918-922

Authors: KOLODZEY J CHOWDHURY EA QUI G OLOWOLAFE J SWANN CP UNRUH KM SUEHLE J WILSON RG ZAVADA JM
Citation: J. Kolodzey et al., THE EFFECTS OF OXIDATION TEMPERATURE ON THE CAPACITANCE-VOLTAGE CHARACTERISTICS OF OXIDIZED ALN FILMS ON SI, Applied physics letters, 71(26), 1997, pp. 3802-3804

Authors: CHOWDHURY EA KOLODZEY J OLOWOLAFE JO QIU G KATULKA G HITS D DASHIELL M VANDERWEIDE D SWANN CP UNRUH KM
Citation: Ea. Chowdhury et al., THERMALLY OXIDIZED ALN THIN-FILMS FOR DEVICE INSULATORS, Applied physics letters, 70(20), 1997, pp. 2732-2734
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